CVD SICフォーカスリング

As the foundation of modern electronic devices and information technology, semiconductor technology has become an indispensable part of today's society. From smartphones to computers, communication equipment, medical equipment and solar cells, almost all modern technologies rely on the manufacture and application of semiconductor devices.

As the requirements for functional integration and performance of electronic devices continue to increase, semiconductor process technology is also constantly evolving and improving. As the core link in semiconductor technology, the etching process directly determines the structure and characteristics of the device.

The etching process is used to accurately remove or adjust the material on the surface of the semiconductor to form the desired structure and circuit pattern. These structures determine the performance and functionality of semiconductor devices. The etching process is able to achieve nanometer-level precision, which is the basis for manufacturing high-density, high-performance integrated circuits (ICs).

CVD SiC Focus Ring is a core component in dry etching, mainly used to focus plasma to make it have higher density and energy on the wafer surface. It has the function of evenly distributing gas. VeTek Semiconductor grows SiC layer by layer through the CVD process and finally obtains the CVD SiC Focus Ring. The prepared CVD SiC Focus Ring can perfectly meet the requirements of the etching process.

CVD SiC Focus Ring is excellent in mechanical properties, chemical properties, thermal conductivity, high temperature resistance, ion etching resistance, etc.

● High density reduces etching volume

● High band gap and excellent insulation

● High thermal conductivity, low expansion coefficient, and heat shock resistance

● High elasticity and good mechanical impact resistance

● High hardness, wear resistance, and corrosion resistance

VeTek Semiconductor has the leading CVD SiC Focus Ring processing capabilities in China. Meanwhile, VeTek Semiconductor's mature technical team and sales team help us provide customers with the most suitable focus ring products. Choosing VeTek semiconductor means partnering with a company committed to pushing the boundaries of CVD silicon carbide innovation.

With a strong emphasis on quality, performance, and customer satisfaction, we deliver products that not only meet but exceed the rigorous demands of the semiconductor industry. Let us help you achieve greater efficiency, reliability, and success in your operations with our advanced  CVD silicon Carbide solutions.

SEM DATA OF CVD SIC FILM

Basic physical properties of CVD SiC coating

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